Filtration is used in the production of chemical mechanical polarisation (CMP) slurries used for polishing wafers.

The washing of the wafers uses large volumes of ultrapure water to avoid any contamination affecting performance and filtration is used for the same reason at the point-of-use for process gases.

Stages of Filtration & Water Treatment

Particle Removal

Prevents debris, scale flakes, dirt and particle build up in pipework, tanks, equipment and where present, premature blinding of filtration stages further along the cascade.

Particle Removal - Fileder Filter Systems

Efficient Particle Removal

Controlling quality levels by removing the majority of contaminants at a specified micron size.

Efficient Particle Removal - Fileder Filter Systems

Bacteria Removal

Reducing the levels of bacteria to log 7

Bacteria Removal - Fileder Filter Systems

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